E-Beam 1 Evaporation - Semi Conductor [Unguided]

Deposit Au, Ti, Ni, Cr, Si, Ge, Pt with this 4-pocket e-beam evaporator (additional materials require clearance). Wafers load onto a stationary holder. System reaches ultra-high vacuum (2e-6 Torr) in ~2 hours with a cryo pump. Real-time thickness monitoring by INFICON XTC/2.

Category: Semiconductor
Grades: Grades 9-12
Variant: Unguided
Standards: NGSS Physical Science, NGSS Engineering
Plays on: VRDesktopWeb

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Lab objectives and outcomes

Students will be able to identify the key components of a 4-pocket e-beam evaporator system, including the cryo pump, wafer holder, and thickness monitor.
Students will be able to demonstrate the correct operational sequence for loading a wafer and establishing an ultra-high vacuum environment (2e-6 Torr) within the e-beam evaporator.
Students will be able to monitor and interpret real-time thickness data from the INFICON XTC/2 during the simulated deposition of materials like Au, Ti, or Ni.

E-Beam 1 Evaporation - Semi Conductor [Timed Unguided]
Deposit Au, Ti, Ni, Cr, Si, Ge, Pt with this 4-pocket e-beam evaporator (additional materials require clearance). Wafers load onto a stationary holder. System reaches ultra-high vacuum (2e-6 Torr) in ~2 hours with a cryo pump. Real-time thickness monitoring by INFICON XTC/2.
SemiconductorGrades 9-12

Suggested activities

E-Beam 1 Evaporation - Semi Conductor Quiz

Pre-assessment

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E-Beam 1 Evaporation - Semi Conductor Discussion

Post-assessment

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Track learner progress

Run this simulation with a class and watch it happen: who started, who finished, and how long each learner took. Drill into a run to see what they actually did.

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E-Beam 1 Evaporation - Semi Conductor [Timed]

Deposit Au, Ti, Ni, Cr, Si, Ge, Pt with this 4-pocket e-beam evaporator (additional materials require clearance). Wafers load onto a stationary holder. System reaches ultra-high vacuum (2e-6 Torr) in ~2 hours with a cryo pump. Real-time thickness monitoring by INFICON XTC/2.

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