Trion ICP / RIE Dry Etch - Semi Conductor

User-friendly Trion etcher: Load lock, touch screen, RIE or ICP power options. Versatile with chlorine & fluorine gases for diverse etch recipes.

Category: Semiconductor
Grades: Grades 9-12
Variant: Guided
Standards: NGSS Physical Science, NGSS Engineering
Plays on: VRDesktopWeb

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Lab objectives and outcomes

Students will be able to operate the load lock and configure basic etch parameters using the Trion etcher's touch screen interface.
Students will be able to select the appropriate power option (RIE or ICP) and gas chemistry (chlorine or fluorine) for a specified dry etch application.
Students will be able to execute a step-by-step dry etch process on the Trion etcher, from sample loading to process start-up.

E-Beam 1 Evaporation - Semi Conductor [Timed Unguided]
Deposit Au, Ti, Ni, Cr, Si, Ge, Pt with this 4-pocket e-beam evaporator (additional materials require clearance). Wafers load onto a stationary holder. System reaches ultra-high vacuum (2e-6 Torr) in ~2 hours with a cryo pump. Real-time thickness monitoring by INFICON XTC/2.
SemiconductorGrades 9-12

Suggested activities

Trion ICP / RIE Dry Etch - Semi Conductor Quiz

Pre-assessment

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Trion ICP / RIE Dry Etch - Semi Conductor Discussion

Post-assessment

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Track learner progress

Run this simulation with a class and watch it happen: who started, who finished, and how long each learner took. Drill into a run to see what they actually did.

Group sessions

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E-Beam 1 Evaporation - Semi Conductor [Timed]

Deposit Au, Ti, Ni, Cr, Si, Ge, Pt with this 4-pocket e-beam evaporator (additional materials require clearance). Wafers load onto a stationary holder. System reaches ultra-high vacuum (2e-6 Torr) in ~2 hours with a cryo pump. Real-time thickness monitoring by INFICON XTC/2.

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E-Beam 1 Evaporation - Semi Conductor [Unguided]

Deposit Au, Ti, Ni, Cr, Si, Ge, Pt with this 4-pocket e-beam evaporator (additional materials require clearance). Wafers load onto a stationary holder. System reaches ultra-high vacuum (2e-6 Torr) in ~2 hours with a cryo pump. Real-time thickness monitoring by INFICON XTC/2.

SemiconductorGrades 9-12

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SemiconductorGrades 9-12

E-Beam 1 Evaporation - Semi Conductor

Deposit Au, Ti, Ni, Cr, Si, Ge, Pt with this 4-pocket e-beam evaporator (additional materials require clearance). Wafers load onto a stationary holder. System reaches ultra-high vacuum (2e-6 Torr) in ~2 hours with a cryo pump. Real-time thickness monitoring by INFICON XTC/2.

SemiconductorGrades 9-12

Trion ICP / RIE Dry Etch - Semi Conductor

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